Gun

W, LaB6(option)

LaB6, W(option)

Resolution (lattice) ※１

0.204 nm@120kV (Off-axis)

0.19 nm@120 kV (on-axis)

Magnification

Zoom

x200～x200,000 (HC)

x4000～x600,000 (HR)

(Non-rotation zooming system)

x1,000～x300,000 (HC)

x4000～x1,000,000 (HR)

Low Mag

x50～x1,000

x100～x1,000

Stage

4-axis eucentric goniometer stage

5-axis eucentric   goniometer stage

Maximum tilt angle

±70°

±10°

3D tomography

Yes   (Standardization)

No

STEM  

Yes

Yes

EDS

Yes

Yes

Standard features

Auto focus,   Microtrace, Autodrive, Live FFT, Measurement, Low dose, API (auto   pre-irradiation), Image navigation function,, Whole view function*2, Drift   correction function, 3D tilt image acquisition function*2, etc.

Main option

STEM,　Cold finger,   X-ray analysis system (EDX), LaB6 filament*3, Beam stopper*3,  Selected area aperture*3, 5-axis   eucentric goniometer stage*3, TEM mapping, Various specimen   holders, Dry pump, etc.